LifeCore's three-compartment electrolysis technology means that cells as the key to electrolysis are divided into three compartments. LifeCore has produced remarkable results in reducing pollution and risk by applying this technology to high-tech semiconductor cleaning technology. LifeCore has already started to supply the cleaning equipment to a global semiconductor company.
"LifeCore attributes the development of the water-based semiconductor cleaning equipment to the three-compartment electrolysis technology".
Unlike existing technologies using only one ion-exchange membrane (diaphragm) for water electrolysis, LifeCore uses the electrolysis method that enables cations and anions to travel selectively by installing two ion-exchange membranes for the anode and the cathode. As a result, the applications and features of ionized water can be maximized with the extended pH range of water, pH 3.0 - 11.5.
Thanks to the technology, LifeCore could clean semiconductor circuits by using water instead of chemicals. There have been the major drawbacks of the conventional chemical cleaners since the wafer, one of semiconductor production equipment, gest to support the nanoscale circuit integration.
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